Thin film transistor and method for fabricating the same with step formed at certain layer

ABSTRACT

The present invention relates to a thin film transistor for preventing short of circuit by step and a method for fabricating the thin film transistor and provides a thin film transistor including a buffer layer formed on glass substrate; an activation layer formed on the buffer layer; and a gate insulation layer formed on the buffer layer including the activation layer, with the buffer layer having a step formed between a lower part of the activation layer and a part except the lower part of the activation layer.

CLAIM OF PRIORITY

This application makes reference to, incorporates the same herein, andclaims all benefits accruing under 35 U.S.C. § 119 from an applicationfor THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME earlierfiled in the Korean Intellectual Property Office on 17 Apr. 2003 andthere duly assigned Serial No. 2003-24431.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a thin film transistor and a method forfabricating the same, more particularly, to a thin film transistor forpreventing short of circuit due to step and a method for fabricating thesame.

2. Description of Related Art

Recently, thickness of gate insulation layer of a thin film transistoris gradually reduced. However, frequency of short generation betweenactivation layer and gate electrode is increased as thickness of thegate insulation layer on the side wall of the activation layer is beingreduced due to a high step generated as buffer layer in the lower partof the activation layer is etched at the same when the activation layeris formed.

The earlier art is described in detail as follows.

A polysilicon layer is formed by crystallizing an amorphous siliconlayer deposited on a glass substrate equipped with buffer layer. Then,an activation layer is formed by patterning the polysilicon layer, andsurface treatment process is performed using HF, etc., to removeimpurities on the surface of the activation layer.

Next, a gate insulation layer is deposited on the substrate, and a gateelectrode is formed on the gate insulation layer.

A step A1 is formed on the buffer layer accordingly since the bufferlayer is over-etched in patterning process for forming the activationlayer and surface treatment process for treating the surface of theactivation layer.

It can be seen that thickness of the gate insulation layer on the sidewall of the activation layer is reduced by the high step A1 formed byover-etching of the buffer layer. That is, it can be seen that thicknessof the gate insulation layer on the side wall of the activation layer isreduced from B1 to B2. Therefore, a short can be generated between theactivation layer and gate electrode as thickness of the gate insulationlayer is reduced.

There is a method for forming the gate insulation layer thickly in orderto solve the foregoing problems. However, there are problems in thatdriving voltage is increased, and power consumption is increased if thegate insulation layer is deposited thickly.

SUMMARY OF THE INVENTION

Therefore, in order to solve the foregoing problems of the earlier art,it is an object of the present invention to provide a thin filmtransistor capable of preventing short of circuit by controlling stepformed during formation of activation layer and preventing deteriorationof efficiency or generation of display defects by decreasing thicknessof gate insulation layer and a method for fabricating the thin filmtransistor.

It is another object to provide a thin film transistor in which a shortis not generated between the activation layer and gate electrode byforming gate insulation layer to an even thickness on the side wall ofthe activation layer in case that the step is formed in a heightcorresponding to a half or less of the thickness sum of the activationlayer and gate insulation layer.

It is yet another object of the present invention to provide a thin filmtransistor capable of forming gate insulation layer more thinly andcontrolling thickness of activation layer also in advance by controllingthe step.

It is still another object of the present invention to provide a thinfilm transistor that is easy and inexpensive to manufacture and yet morereliable.

It is another object to provide a thin film transistor capable ofpreventing a short of a circuit while not increasing driving voltage andpower consumption.

In order to achieve the foregoing and other objects, the presentinvention provides a thin film transistor including a buffer layerformed on glass substrate; an activation layer formed on the bufferlayer; and a gate insulation layer formed on the buffer layer includingthe activation layer, wherein the buffer layer has a step formed betweena lower part of the activation layer and a part except the lower part ofthe activation layer, and the step is a half or less of the thicknesssum of the activation layer and gate insulation layer.

It is preferable that the buffer layer has a step to such a degree thatthickness of the gate insulation layer is not changed on the side wallof the buffer layer. Furthermore, it is preferable that thickness of thegate insulation layer is 400 Å (Angstroms) or more in case thatthickness of SPC polysilicon is 300 Å and step is 350 Å in theactivation layer, and thickness of the gate insulation layer is 1,000 Åor more in case that thickness of ELA polysilicon is 500 Å and step is750 Å in the activation layer.

Furthermore, the present invention provides a method for fabricating athin film transistor including the steps of depositing an amorphoussilicon layer on glass substrate equipped with buffer layer; forming apolycrystalline silicon layer by crystallizing the amorphous siliconlayer; forming an activation layer by etching the polycrystallinesilicon layer; treating the surface of the activation layer; anddepositing a gate insulation layer on the substrate, wherein etchingtime is controlled in the activation layer forming process andactivation layer surface treatment process so that step is between alower part of gate in the buffer layer and a part except the lower partof the gate has a step value corresponding to a half or less of thethickness sum of the activation layer and gate insulation layer.

In preferred embodiments of the present invention, it is preferable thatthe etching time is controlled so that the buffer layer has a step tosuch a degree that thickness of the gate insulation layer is not changedon the side wall of the buffer layer, and the buffer layer has a stepcorresponding to a half or less of the thickness sum of the activationlayer and gate insulation layer.

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete appreciation of the invention, and many of the attendantadvantages thereof, will be readily apparent as the same becomes betterunderstood by reference to the following detailed description whenconsidered in conjunction with the accompanying drawings in which likereference symbols indicate the same or similar components, wherein:

FIG. 1 is a cross sectional view illustrating a conventional thin filmtransistor;

FIG. 2 is a SEM photograph showing that short is generated at the sidesurface of activation layer by over-etching in the conventional thinfilm transistor; and

FIG. 3 is a thin film transistor according to one preferred embodimentof the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Turning now to the drawings, FIG. 1 is a cross sectional viewillustrating a conventional thin film transistor and FIG. 2 is a SEMphotograph showing that a short is generated at the side surface ofactivation layer by over-etching in the conventional thin filmtransistor.

Referring to FIG. 1, a polysilicon layer is formed by crystallizing anamorphous silicon layer deposited on a glass substrate 100 equipped withbuffer layer 110. Then, an activation layer 120 is formed by patterningthe polysilicon layer, and surface treatment process is performed usingHF, etc., to remove impurities on the surface of the activation layer120.

Next, a gate insulation layer 130 is deposited on the substrate, and agate electrode 140 is formed on the gate insulation layer.

A step A1 is formed on the buffer layer 110 accordingly since the bufferlayer 110 is over-etched in patterning process for forming theactivation layer 120 and surface treatment process for treating thesurface of the activation layer 120.

Referring to FIG. 2, it can be seen that thickness of the gateinsulation layer 130 on the side wall of the activation layer 120 isreduced by the high step A1 formed by over-etching of the buffer layer110. That is, it can be seen that thickness of the gate insulation layeron the side wall of the activation layer is reduced from B1 to B2 asillustrated in FIG. 2. Therefore, a short can be generated between theactivation layer 120 and gate electrode 140 as thickness of the gateinsulation layer 130 is reduced.

There is a method for forming the gate insulation layer 130 thickly inorder to solve the foregoing problems. However, there are problems inthat driving voltage is increased, and power consumption is increased ifthe gate insulation layer 130 is deposited thickly.

The present invention will now be described in detail in connection withpreferred embodiments with reference to the accompanying drawings. Forreference, like reference characters designate corresponding partsthroughout several views.

FIG. 3 is a thin film transistor according to one preferred embodimentof the present invention. As seen in FIGS. 1–3, each one of the steps A1and A2 is a distance until a top of the buffer layer overstretched fromtop of the activation layer. In addition, the degree of the step is theheight of the step.

Referring to FIG. 3, a buffer layer 210 (diffusion barrier) is formed ona glass substrate 200 to prevent impurities such as metal ions diffusedfrom the glass substrate 200 from infiltrating into the activation layerof polycrystalline silicon.

An amorphous silicon layer is deposited on an upper part of the bufferlayer 210 after forming the buffer layer 210. The dehydrogenatedamorphous silicon layer is formed into polycrystalline silicon layer(polysilicon layer) through crystallization method such as ELA (excimerlaser annealing), etc., after dehydrogenating the amorphous siliconlayer. Then, photoresist for forming an activation layer is formed onthe polysilicon layer, and the activation layer 220 that functions aschannel region of TFT (thin film transistor) is formed by patterning thepolysilicon layer using the photoresist as a mask.

Next, the surface of the activation layer 220 is treated by a materialsuch as HF to remove impurities including photoresist remaining on thesurface of the activation layer 220 after the process of forming theactivation layer 220.

A step A2 is formed on the buffer layer 210 due to over-etching of thebuffer layer 210 during the activation layer forming process andactivation layer surface treatment process. However, the step A2 iscontrolled in the present invention so that gate insulation layer isdeposited to an even thickness on the side wall of the activation layerwhen subsequently depositing the gate insulation layer by controllingover-etching time of the buffer layer 210 during the activation layerforming process and activation layer surface treatment process.

The following Table 1 is a table showing a relation between thickness ofthe gate insulation layer 230 and step A2 caused by over-etching.

TABLE 1 Relation between thickness of the gate insulation layer andover-etching The maximum over etching value = Thickness (gate insulationlayer+ Destruction Over etching of Si polysilicon thickness)/2 of TRGate insulation layer 500 Å ELA 500 Å 750 Å Action Silicon oxide layer(1000 Å) 700 Å ELA 500 Å 750 Å Destruction initiation 1000 Å  ELA 500 Å750 Å Destruction 200 Å SPC 300 Å 350 Å Action Silicon oxide layer (400Å) 400 Å SPC 300 Å 350 Å Destruction initiation

Referring to Table 1, it can be seen that a thin film transistor isdestructed if step A2 having a height of 700 Å or more is formed byover-etching of buffer layer in case that thickness of ELA polysiliconlayer used as activation layer 220 is 500 Å, and thickness of siliconoxide film that is gate insulation layer 230 is 1000 Å.

Furthermore, it can be also seen that the thin film transistor isdestructed if step A2 having a height of 400 Å or more is formed byover-etching of buffer layer in case that thickness of SPC (solid phasecrystallization) polysilicon layer that is an activation layer is 300 Å,and thickness of silicon oxide film that is gate insulation layer 230 is400 Å.

That is, the thin film transistor is destructed if the step A2 formed byover-etching of the buffer layer has a height corresponding to a half ormore of the thickness sum of the gate insulation layer 230 andpolysilicon layer as seen in the table 1 representing a relation betweenthickness of the gate insulation layer 230 and over-etching.

Therefore, it is preferable that step A2 of the buffer layer is formedin a height corresponding to a half or less of the thickness sum of thegate insulation layer 230 and polysilicon layer.

Subsequently, gate insulation layer 230 is formed on substrate equippedwith the activation layer 220, a conductive gate metal is deposited onthe upper part of the gate insulation layer 230, and gate electrode 240is formed by patterning the gate metal.

The present invention provides a thin film transistor in which a shortcircuit is not generated between the activation layer and gate electrodeby forming gate insulation layer to an even thickness on the side wallof the activation layer in case that the step is formed in a heightcorresponding to a half or less of the thickness sum of the activationlayer and gate insulation layer as illustrated in the above.

Furthermore, the present invention provides a thin film transistorcapable of forming gate insulation layer more thinly and controllingthickness of activation layer also in advance by controlling the step.

While the invention has been particularly shown and described withreference to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formand details may be made therein without departing from the spirit andscope of the invention.

1. A thin film transistor comprising: a buffer layer formed on asubstrate; an activation layer formed on said buffer layer; and a gateinsulation layer formed on said substrate including said activationlayer, with said buffer layer having a step formed between a lower partof said activation layer and a part except said lower part of saidactivation layer, and said step being a half or less of the thicknesssum of said activation layer and gate insulation layer, said bufferlayer has a step to such a degree that thickness of said gate insulationlayer is not changed on said side wall of said buffer layer.
 2. The thinfilm transistor according to claim 1, wherein said activation layerbeing a polysilicon, and a thickness of the gate insulation layer is 400Å or more when a thickness of said polysilicon is 300 Å and step is 350Å in said activation layer.
 3. The thin film transistor according toclaim 1, wherein said activation layer being polysilicon, and thicknessof the gate insulation layer is 1,000 Å or more when a thickness of saidpolysilicon is 500 Å and step is 750 Å in said activation layer.
 4. Thethin film transistor according to claim 1, wherein a thickness of thegate insulation layer is at least 400 Å when a thickness of saidactivation layer is 300 Å and step is 350 Å in said activation layer. 5.The thin film transistor according to claim 1, wherein the step of saidbuffer layer being formed on a single body of said buffer layer with thestep protruding from a flat portion of said buffer layer.
 6. A methodfor fabricating said thin film transistor of claim 1, comprising thesteps of: depositing an amorphous silicon layer on a substrate equippedwith buffer layer; forming a polycrystalline silicon layer bycrystallizing said amorphous silicon layer; forming an activation layerby etching said polycrystalline silicon layer; treating the surface ofsaid activation layer; and depositing a gate insulation layer on saidsubstrate, with etching time being controlled in said activation layerforming process and activation layer surface treatment process so thatstep between a lower part of gate in the buffer layer and a part exceptthe lower part of said gate has a step value corresponding to a half orless of the thickness sum of said activation layer and gate insulationlayer.
 7. The method for fabricating a thin film transistor according toclaim 6, wherein the etching time is controlled so that said bufferlayer has a step to such a degree that thickness of said gate insulationlayer is not changed on said side wall of said buffer layer.
 8. Themethod for fabricating a thin film transistor according to claim 6,wherein the etching time is controlled to accommodate said buffer layerhaving a step corresponding to a half or less of the thickness sum ofthe activation layer and gate insulation layer.
 9. The method forfabricating a thin film transistor according to claim 8, wherein theetching time is controlled so that said buffer layer has a step to sucha degree that thickness of said gate insulation layer is not changed onsaid side wall of said buffer layer.
 10. The method for fabricating athin film transistor according to claim 6, wherein a thickness of saidgate insulation layer is 400 Å or more when the thickness of solid-phasecrystallization polysilicon is 300 Å and step is 350 Å in saidactivation layer.
 11. The method for fabricating a thin film transistoraccording to claim 6, wherein thickness of said gate insulation layer is1,000 Å or more when the thickness of excimer laser annealingpolysilicon is 500 Å and step is 750 Å in said activation layer.
 12. Athin film transistor, comprising: a buffer layer; an activation layerformed on said buffer layer; and a gate insulation layer formed on saidbuffer layer and said activation layer, with said buffer layer having astep formed between a lower part of said activation layer and a partexcept said lower part of said activation layer, and said step being upto a half of the thickness sum of said activation layer and gateinsulation layer, said step being controlled according to said gateinsulation layer being deposited to an even thickness on a side wall ofsaid activation layer.
 13. The thin film transistor according to claim12, with said activation layer comprising a polysilicon, and a thicknessof said gate insulation layer being at least 400 Å when a thickness ofsaid polysilicon is 300 Å and step is 350 Å in said activation layer.14. The thin film transistor according to claim 12, with said activationlayer comprising a polysilicon, and a thickness of said gate insulationlayer being at least 1,000 Å when a thickness of said polysilicon is 500Å and step is 750 Å in said activation layer.